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【英文标准名称】:StandardPracticeforScanningElectronMicroscopeBeamSizeCharacterization
【原文标准名称】:扫描电子显微镜射束尺寸特征描述标准实施规程
【标准号】:ASTME986-2004(2010)
【标准状态】:现行
【国别】:美国
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E04.11
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:electronbeamsize;E766;graphitefiber;magnification;NIST&x2013;SRM2069B;resolution;SEM;SEMperformance;spotsize;waveform;Electronmicroscopy;Scanningelectronmicroscope(SEM)
【摘要】:ThetraditionalresolutiontestoftheSEMrequires,asafirststep,aphotomicrographofafineparticulatesampletakenatahighmagnification.Theoperatorisrequiredtomeasureadistanceonthephotomicrographbetweentwoadjacent,butseparateedges.Theseedgesareusuallylessthanonemillimetreapart.TheirimagequalityisoftenlessthanoptimumlimitedbytheS/Nratioofabeamwithsuchasmalldiameterandlowcurrent.Operatorjudgmentisdependentontheindividualacuityofthepersonmakingthemeasurementandcanvarysignificantly.UseofthispracticeresultsinSEMelectronbeamsizecharacterizationwhichissignificantlymorereproduciblethanthetraditionalresolutiontestusingafineparticulatesample.1.1Thispracticeprovidesareproduciblemeansbywhichoneaspectoftheperformanceofascanningelectronmicroscope(SEM)maybecharacterized.TheresolutionofanSEMdependsonmanyfactors,someofwhichareelectronbeamvoltageandcurrent,lensaberrations,contrastinthespecimen,andoperator-instrument-materialinteraction.However,theresolutionforanysetofconditionsislimitedbythesizeoftheelectronbeam.Thissizecanbequantifiedthroughthemeasurementofaneffectiveapparentedgesharpnessforanumberofmaterials,twoofwhicharesuggested.ThispracticerequiresanSEMwiththecapabilitytoperformline-scantraces,forexample,Y-deflectionwaveformgeneration,forthesuggestedmaterials.TherangeofSEMmagnificationatwhichthispracticeisofutilityisfrom1000to50000x00D7;.Highermagnificationsmaybeattempted,butdifficultyinmakingprecisemeasurementscanbeexpected.1.2Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:N32
【国际标准分类号】:37_020
【页数】:3P.;A4
【正文语种】:英语